压力传感器芯片设计及温度分析.pdf
时间:10-08 15:15
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简介:
设计了双岛梁结构量程是200Pa的超微压力传感器,进行了理论分析与计算,并对模片上的电阻条的宽度和长度进行了研究,为传感器惠斯通电桥的设计提供了重要的依据 通过有限元仿真软件,对传感器进行了温度分析,探索
出了传感器的工作温度范围 最后,对传感器芯片尺寸进行了相关分析,发现随着尺寸增加和膜片厚度减小,纵向横向纵横应力差及VonMises应力均增加,但弯曲程度也相应增大,即灵敏度提高,线性度下降。
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)